Vacuum Measurement and Control Rough Vacuum Gauges 1000 - < 1 mbar

 with Bourdon Feather

 with Ceramic Sensor, ATEX

Rough vacuum gauges - Measuring range: atmospheric to 1 mbar.

Besides the traditional vacuum gauges with mechanical sensors (e.g. Bourdon,
capsule gauge) diaphragm manometers with electronical diaphragm sensors are
well established (Piezo and capacitance gauges).
The pressure to be measured is separated by a diaphragm from a reference
vacuum and compared to the latter. The movement of the diaphragm is registered
either by a piezo resistive system or the diaphragm is part of a capacitor
(capacitance vacuum system). For improved chemical resistance the diaphragm is
often made of aluminium oxide ceramic.
The pressure measurement is independent of the type of gas.