Vacuum Pumps

 Diaphragm Pumps

 WOB-L Piston Pumps

 Scroll pumps

 Rotary Vane Pumps

 SST Turbomolecular Pumps

 Oil Diffusion Pumps

For the production of a vacuum from the rough- into the high vacuum range
different pumping principles are used. So e.g. for the
- rough vacuum range = diaphragm pumps,
- rough- and fine vacuum range = scroll and rotary vane pumps,
- high and ultra high vacuum range = turbomolecular- and oil diffuion pumps
(in combination with diaphragm-, scroll- and rotary vane pumps as
fore-pumps)